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집속이온빔
Focused Ion Beam

영문약어 FIB
장비명(한글) 집속이온빔 
기기코드 SC241
연구장비표준분류
기기상태 양호 
SC241.jpg

부서 및 장비담당자

부서 및 장비담당자
지역 서울센터 
주소 (02855)
서울특별시 성북구 인촌로 22길 6-7 고려대학교 자연캠퍼스 내 한국기초과학지원연구원 
보유센터 및 부서 서울센터 시공간분자이미징연구팀 
장비담당자 양민호
전화 02-6943-4170 
팩스 000-000-0000 
메일 yangmino@kbsi.re.kr  

Spec 및 활용분야

원리 및 특징
    집속 빔을 시료 표면에 주사해서 발생하는 2차이온등을 검출해서 현미 경상을 관찰 또는 시료 표면을 가공하는 장치
    (문의 : 02-6943-4112)
구성 및 성능
    ○ Focused Ion Beam
    ○ Resolution
    - 3.5nm guaranteed or better @ 30kVacc(SEM)
    - 15nm guaranteed or better @ 30kVacc(FIB)
    ○ Magnification : × 20 ~ × 1,500,000
    ○ Electron optics
    - Electron gun : Thermal (W emitter)
    - Accelerating voltage : 5kV to 30 kV
    ○ Ion optics
    - Ion gun : Ga ion
    - Accelerating voltage : 5kV to 30 kV
    ○ ~100nm 내외의 나노가공, 패터닝, TEM 시편제작이 가능
활용분야
    ○나노가공 및 TEM 시편제작
    - 소자 단면 가공
    - 나노 분말의 단면 가공
    - 3D 분석을 위한 연속 밀링
    - 나노소자 수정
    ○이미지 및 단면가공 : Si, GaN, Glass, Poly carbonate 기판위에 성장한 다층박막 구조분석
    ○불량분석 : 나노제품의 불량 분석

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