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기기검색

장비 상세조회

고분해능 주사전자현미경
High Resolution Scanning Electron Microscope

분석장비 상세내역
영문약어 HR-SEM
장비명(한글) 고분해능 주사전자현미경 
기기코드 CJ113
연구장비표준분류
기기상태 양호 
CJ113.JPG

부서 및 장비담당자

부서 및 장비담당자
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Spec 및 활용분야

Spec 및 활용분야
원리 및 특징
    집속된 전자빔을 시료표면에 주사할때 발생하는 이차전자, 후방산란전자, 특성 X-선, 투과전자를 검출하여 표면이미지 분석, 성분분석, 투과이미지 분석을 수행.
구성 및 성능
    모델 : SU8230 (Hitachi, Japan)
    1.이미지 분해능 (이차전자)
    - 0.8nm at 15kV
    - 1.1nm at 1kV
    - 투과자전자이미지 분석 (BF/DF)
    2. 배율
    - LM mode : x20 to x2,000
    - HM mode : x100 to x1,000,000
    3. 가속전압
    - Standard : 0.5 to 30kV
    - Deceleration : 0.01 to 2.0kV
    4. 성분분석(EDS)
    - Light Element Detector (LN2 free type)
    - SDD detector 80mm2, 127eV at Mn Ka
    - Detectable elements : 4Be ~ 94Pu
활용분야
    - 반도체
    - 탄소복합체
    - 금속
    - 나노구조체 등

장비 공지사항


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분석지원 상담센터 - 상담분야, ARS, 상태 항목으로 구분되어 있습니다.
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